The Scholar's Field Guide to Clemson University

Center for Optical Materials Science and Engineering Technology (COMSET) Clemson University Micro Fabrication Facility at COMSET The Center for Optical Materials Science and Engineering Technology (COMSET) , formed in 2000, is an interdisciplinary unit of the College of Engineering, Computing and Applied Sci- ences at Clemson University. COMSET provides an organized framework with significant cen tralized infrastructure for faculty with common interests to collaborate in developing advanced materials, devices and systems that generate, transmit, manipulate and utilize light. The Clemson University Micro Fabrication Facility provides academic and industry researchers easy access to a complete microelectronic, optoelectronic and MEMS fabrication facility. Pro- cessing includes wafer cleaning, photolithography, metal and oxide deposition, plasma etching, metrology and device singulation. Complete fabrication of microelectronic, micro-optic and MEMS devices can be accomplished at Clemson’s facility. The Micro Fabrication Facility is equipped with: • Modified chemical vapor disposition (MCVD) lath • Heathway 6.5 meter optical fiber draw towe • Jobin Yvon Horiba Fluorolog 3-222 Tau 3/TCSPC photoluminescence spectrophotometer • Perkin Elmer Lambda 900 UV/Vis/NIR spectrometer • Photon Technology International Inc. Fluorescence Master Systems Quanta Master 60 fluoromete – 18 –